Pressure Sensors
First Sensor develops and manufactures piezoresistive pressure sensors as powerful platform-based pressure sensor, solutions for customer specific requirements as well as unique sensor solutions. The core competence of First Sensor is the development and manufacture of piezoresistive pressure sensors in a variety of stages. We offer chips, system components, sensing and fluidic control systems for OEM customers worldwide
Being one of the leading companies in the field of piezoresistive pressure sensors our solutions are well known for the highest quality, performance and long term stability.
Core Competencies
- Extensive expertise in pressure sensor technology plus consulting skills for a great variety of applications
- Consistently focusing all processes to our customers' requirement of optimal technical and economic implementation
- Design
- Chip production
- Packaging
- Calibration
- Testing characterization (pressure, temperature, stability, electrical parameters) - Customer-specific adaptations and unique solutions for complex and challenging applications
- Flexible production capacity
- Project management and logistics
Design & construction
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First Sensor has had many years of experience and practice with simulations in the following areas:
- Simulation and calculation
- FEM analysis:
- Mechanical
- Electrical
- Thermal
- Coupled - Layout and design tools:
- Mask design
- Board design
- 3D CAD
- Construction and prototyping
State-of-the-art CAD tools are used for design purposes:
Sensor development
- Piezoresistive pressure sensors for applications up to 225°C
- Pressure sensor systems as OEM and system solutions (signal processing/calibration, interface and housings)
- Semiconductor processes
- MEMS processes and qualifications
- Customer-specific layouts, circuits and interfaces
- Testing and validating in accordance to customer's specification
- Transition to series production
Technology
First Sensor has had many years of experience and practice with simulations in the following areas:
- Double-sided lithography
- High-precision, anisotropic sinc-function structuring
- Special processes such as anodic bonding (silicon-glass) and silicon direct bonding (silicon-silicon)
- Special sawing processes
- PCB/ceramic (SMT, COB) equipment in connection with pressure sensor circuits
- Calibration (pressure, temperature)
Metrology
First Sensor has a wide range of metrological devices at its disposal for the following purposes:
- Mechanical and geometric measurement of MEMS structures
- Electrical characterisation at wafer level and for sensors in housings
- Temperature and climate characterisation
- Climate racks up to 180°C
- Temperature racks up to 550°C - Qualification of sensors
Quality Management
The quality management system of First Sensor is certified with standards of ISO/TS16949:2009. This international technical specification includes all requirements of ISO 9001.
The quality management system at the Munich site is certified for ISO 13485 (Medical Devices Act) and ISO 9001.
