Pressure Sensors
First Sensor develops and manufactures piezoresistive pressure sensor solutions for customer specific requirements. The core competence of First Sensor is the development and manufacture of piezoresistive pressure sensors working at ambient temperatures of up to 225 °C. We manufacture chips, in a variety of forms: chips, system components, and sensor systems.
The First Sensor product portfolio of piezoresistive pressure sensor solutions ranges from the modular sensor component to the development and manufacture of unique sensor solutions. Being one of the leading companies in the field of piezoresistive pressure sensors our solutions are well known for the highest quality, performance and long term stability.
Core Competencies
- Extensive expertise in pressure sensor technology
- Design
- Chip production
- Packaging
- Calibration
- Testing characterization (pressure, temperature, stability, electrical parameters) - Customer-specific adaptations and unique solutions
- Flexible production capacity
- Project management and logistics
Design & construction
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First Sensor has had many years of experience and practice with simulations in the following areas:
- FEM analysis:
- Mechanical
- Electrical
- Thermal
- Coupled - Layout and design tools:
- Mask design
- Board design
- 3D CAD
State-of-the-art CAD tools are used for design purposes:
Sensor development
First Sensor develops:
- Piezoresistive pressure sensors for applications up to 225 °C
- Pressure sensor systems as OEM and system solutions
- (signal processing/calibration, interface and housings)
- Semiconductor processes
- MEMS processes and qualifications
- Customer-specific layouts, circuits and interfaces
Technology
First Sensor has had many years of experience and practice with simulations in the following areas:
- Double-sided lithography
- High-precision, anisotropic sinc-function structuring
- Special processes such as anodic bonding (silicon-glass) and silicon direct bonding (silicon-silicon)
- Special sawing processes
- PCB/ceramic (SMT, COB) equipment in connection with pressure sensor circuits
- Calibration (pressure, temperature)
Metrology
First Sensor has a wide range of metrological devices at its disposal for the following purposes:
- Mechanical and geometric measurement of MEMS structures
- Electrical characterisation at wafer level and for sensors in housings
- Temperature and climate characterisation
- Climate racks up to 180°C
- Temperature racks up to 550°C - Qualification of sensors
Quality Management
The Quality Management System of First Sensor is certified with standards of ISO/TS16949:2002. This international technical specification includes also all requirements of DIN EN ISO 9001:2002.
