The condition monitoring of buildings (structural health monitoring) is a method of recording, processing, and evaluating measurements in order to detect structural changes, damage, and critical stress conditions at an early stage, thereby guaranteeing the functional capability and safe operation of buildings and structures. A new generation of miniaturized sensor-based monitoring systems uses precision MEMS inertial sensors to monitor the deflection of load-bearing structures, building inclination, and deformation. In this way, the load exerted on bridges, for example, by usage, aging, and environmental influences such as wind and temperature is recorded and checked by a dense network of sensors at various locations. Micromachining inertial sensors are also suitable for condition monitoring of wind power systems, high-current cables, and pipelines.
First Sensor operates an innovative technology platform for manufacturing precision inertial sensors that can be flexibly adapted to your customer-specific requirements. The capacitive inclination and acceleration sensors are based on single crystal silicon sensor elements and the latest micromachining technology. The MEMS sensors achieve a very high signal-to-noise ratio as well as exceptional temperature stability and can detect the smallest changes in position or acceleration. The high aspect ratio microstructures (HARMS) guarantee ultra-low cross axis sensitivities. Furthermore, patented AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances by insulating the active areas with an air gap.
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