Custom production of highly accurate MEMS inertial sensors
First Sensor announces the successful qualification of its highly accurate capacitive silicon inertial sensors for the measurement of inclination, acceleration and vibration together with the start of serial production in April, 2017. The sensors consist of a silicon sensor element manufactured according to patented micromechanical technology (HARMS, AIM) combined with ASIC signal processing in a hermetically sealed SMD housing. Depending on the bandwidth, the inertial sensors reach resolutions of 10 μg or 0.0005° (2 arcsec) and can be adapted both mechanically and electrically to the respective customer application. In addition, evaluation kits are available for easy and fast testing and configuration of the sensors.
First Sensors highly accurate inertial sensors feature superior performance characteristics and an excellent price/performance ratio compared to existing devices on the market. The single crystal silicon microstructures with high aspect ratios (HARMS) ensure ultra-low cross axis sensitivities, large signal-to-noise ratios and excellent stability over temperature. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances by isolating the components with an air gap. The inclinometers offer measurement ranges of ±30° and achieve noise densities smaller 0.0004 °/√Hz and resolutions smaller 0.0015° at 10 Hz measuring frequency. First Sensor’s accelerometers with measurement ranges of ±3 g, ±8 g and ±15 g achieve noise densities smaller 30 µg/√Hz and resolutions smaller 40 µg to 95 µg at 10 Hz measuring frequency.Important features of the MEMS inertial sensors:
First Sensors new high precision inclinometers and accelerometers can be used in industry and aviation as well as building and medical technology. Typical applications include geoengineering, condition monitoring, inertial navigation systems, robotics, alignment and leveling.
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