Technical-press-First-Sensor
First Sensor news
We will keep you informed about company and product news.
March 2017

Inertial sensors

Custom production of highly accurate MEMS inertial sensors

First Sensor announces the successful qualification of its highly accurate capacitive silicon inertial sensors for the measurement of inclination, acceleration and vibration together with the start of serial production in April, 2017. The sensors consist of a silicon sensor element manufactured according to patented micromechanical technology (HARMS, AIM) combined with ASIC signal processing in a hermetically sealed SMD housing. Depending on the bandwidth, the inertial sensors reach resolutions of 10 μg or 0.0005° (2 arcsec) and can be adapted both mechanically and electrically to the respective customer application. In addition, evaluation kits are available for easy and fast testing and configuration of the sensors.

First Sensors highly accurate inertial sensors feature superior performance characteristics and an excellent price/performance ratio compared to existing devices on the market. The single crystal silicon microstructures with high aspect ratios (HARMS) ensure ultra-low cross axis sensitivities, large signal-to-noise ratios and excellent stability over temperature. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances by isolating the components with an air gap. The inclinometers offer measurement ranges of ±30° and achieve noise densities smaller 0.0004 °/√Hz and resolutions smaller 0.0015° at 10 Hz measuring frequency. First Sensor’s accelerometers with measurement ranges of ±3 g, ±8 g and ±15 g achieve noise densities smaller 30 µg/√Hz and resolutions smaller 40 µg to 95 µg at 10 Hz measuring frequency.

Important features of the MEMS inertial sensors:

  • patented MEMS micromechanical technology (HARMS, AIM)
  • configurable ASIC signal processing with digital output signal
  • large signal-to-noise ratios with resolutions of 10 μg or 0.0005°
  • highly customizable to fit individual application requirements

First Sensors new high precision inclinometers and accelerometers can be used in industry and aviation as well as building and medical technology. Typical applications include geoengineering, condition monitoring, inertial navigation systems, robotics, alignment and leveling.

Further product information can be found here.

Press photo inertial sensors
Downloads

If you need further information please us.

Company
First Sensor is one of the world's leading suppliers in the field of sensor systems. In the growth market of sensor systems, First Sensor develops and produces customer-specific solutions for the ever-increasing number of applications in the industrial, medical, and mobility target markets. Our goal here is to identify, meet and solve the challenges of the future with our innovative sensor solutions early on.
Investor Relations
Our investor relations activities aim at raising the international publicity of First Sensor AG and at consolidating and extending the perception of our share as an attractive growth stock. This means we keep our online communication transparent, comprehensive and continuous in order to enhance your trust in our share.
Applications
In many market-specific applications, sensors are components that are critical to your success. First Sensor is the partner you need on projects that call for careful selection, customized adaptation and the highest standards of excellence. Our Business Units Industrial, Medical and Mobility are clearly aligned to the core markets of industrial applications, medical technology as well as automotive and transport.
Tailored Solutions
In the growth market of sensor systems, First Sensor develops and produces customer-specific sensors, electronics, modules and complex systems for the ever-increasing number of applications in the industrial, medical, and mobility target markets. As a solution provider the company offers complete development services from a first draft and proof of concept up to the development of prototypes and finally serial production. First Sensor offers comprehensive development expertise, state-of-the-art packaging technologies and production capacities in clean rooms from ISO class 8 to 5.
Solution Services
In the growth market of sensor systems, First Sensor develops and produces customer-specific sensors, electronics, modules and complex systems for the ever-increasing number of applications in the industrial, medical, and mobility target markets. As a solution provider the company offers complete development services from a first draft and proof of concept up to the development of prototypes and finally serial production. First Sensor offers comprehensive development expertise, state-of-the-art packaging technologies and production capacities in clean rooms from ISO class 8 to 5.
Career
Innovation, excellence, proximity – these are our values, our ambition, our drive. Anything less is not an option. Our sensor solutions stand for technical innovation and economic growth. As such, they form the basis for the development and application of new technologies in almost all areas of life. We aim to shape this future together with you.