Inertial-sensors-First-Sensor
Inertial sensor
Sensitive, flexible
SI SA
Inertial sensors
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Inertial sensors

First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements.

Inclinometers and accelerometers

The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

All inertial sensors are customizable and can be adapted or developed to fit specific requirements or applications.

Evaluation boards

Different evaluation boards for simple and fast read-out of the sensor data are available.

Downloads
Inertialsensoren von First Sensor

Performance characteristics

Technical Specifications
Inclinometer parameter SI-11.S1.C-30 Unit
Measurement range ±30 °
Resolution @ 10 Hz  < 0,0015 °
Scale factor (repeatability)  ±35 ppm
Scale-Faktor (Temperaturkoeffizient)  ±50 ppm/K
Bias (repeatability) ±0,0030 °
Bias (temperature coefficient) ±0,0025 °/K
Noise density < 0,0004 °/√Hz
Measuring frequency 400 Hz
Digital interface SPI
Operating temperature -40 … 85 °C

Technical Specifications
Parameter Accelerometer SA-12.S1.C-3 SA-13.S1.C-8 SA-14.S1.C-15 Unit
Measurement range ±3 ±8 ±15 g
Resolution @ 10 Hz < 40  < 65 < 95 µg
Scale factor (repeatability) ±35  ±35 ±35 ppm
Scale factor (temperature coefficient) ±50  ±50 ±50 ppm/K
Bias (repeatability) ±115 ±260 ±470 µg
Bias (temperature coefficient) ±65 ±105 ±175 µg/K
Noise density < 12 < 20 < 30 µg/√Hz
Measuring frequency 400 400 400 Hz
Digital interface SPI SPI SPI
Operating temperature -40 … 85 -40 … 85 -40 … 85 °C

For price and delivery information or any other question please contact First Sensor.
Company
First Sensor is one of the world's leading suppliers in the field of sensor systems. In the growth market of sensor systems, First Sensor develops and produces customer-specific solutions for the ever-increasing number of applications in the industrial, medical, and mobility target markets. Our goal here is to identify, meet and solve the challenges of the future with our innovative sensor solutions early on.
Investor Relations
Our investor relations activities aim at raising the international publicity of First Sensor AG and at consolidating and extending the perception of our share as an attractive growth stock. This means we keep our online communication transparent, comprehensive and continuous in order to enhance your trust in our share.
Applications
In many market-specific applications, sensors are components that are critical to your success. First Sensor is the partner you need on projects that call for careful selection, customized adaptation and the highest standards of excellence. Our Business Units Industrial, Medical and Mobility are clearly aligned to the core markets of industrial applications, medical technology as well as automotive and transport.
Tailored Solutions
In the growth market of sensor systems, First Sensor develops and produces customer-specific sensors, electronics, modules and complex systems for the ever-increasing number of applications in the industrial, medical, and mobility target markets. As a solution provider the company offers complete development services from a first draft and proof of concept up to the development of prototypes and finally serial production. First Sensor offers comprehensive development expertise, state-of-the-art packaging technologies and production capacities in clean rooms from ISO class 8 to 5.
Solution Services
In the growth market of sensor systems, First Sensor develops and produces customer-specific sensors, electronics, modules and complex systems for the ever-increasing number of applications in the industrial, medical, and mobility target markets. As a solution provider the company offers complete development services from a first draft and proof of concept up to the development of prototypes and finally serial production. First Sensor offers comprehensive development expertise, state-of-the-art packaging technologies and production capacities in clean rooms from ISO class 8 to 5.
Career
Innovation, excellence, proximity – these are our values, our ambition, our drive. Anything less is not an option. Our sensor solutions stand for technical innovation and economic growth. As such, they form the basis for the development and application of new technologies in almost all areas of life. We aim to shape this future together with you.